Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 8 Issue 1
- /
- Pages.13-20
- /
- 1995
- /
- 2982-6268(pISSN)
- /
- 2982-6306(eISSN)
Preparation of precision thin film resistor sputtered by magnetron
IC용 초정밀 박막저항소자의 제조와 특성연구
Abstract
To develope a high precision TiAIN thin film resistor, TiAIN films were deposited on A1
Keywords