EFFECT OF Al UNDERLAYER ON THE MICROSTRUCTURES OF CoCrTa/Cr FILMS

  • Chang, H.S. (Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology) ;
  • Shin, K.H. (Division of Metals, Korea Institute of Science and Technology) ;
  • Lee, T.D. (Department of Advanced Material Engineering, Korea Advanced Institute of Science and Technology) ;
  • Park, J.K. (Department of Material Science & Engineering, Korea Advanced Institute of Science and Technology)
  • 발행 : 1995.10.01

초록

Thin CoCrTa/Cr films were deposited on glass substrates at $280^{\circ}C$ with or without Al underlayer. The coercivity of CoCrTa increased considerably by introducing an Al underlayer. The grain size of Cr thin film deposited on Al underlayer became smaller than that of Cr thin film deposited on glass substrate. The grain size of CoCrTa thin film was determined by Cr grain size. The cause of the coercivity increase seems to be associated with the refinement and uniform distribution of CoCrTa grains.

키워드

참고문헌

  1. IEEE Trans. Magn. v.28 Thin Film disks with transient metal underlayers Mohammad Mirzamanni;Christoper V. Jahnes;Michael A. Russak
  2. IEEE Trans. Magn. v.30 Isotropic thin film texture for alternative substrates Toshihiro Kokure;Yoshihiro Matsuno;Toshiya Itoh;Chiemi Shima