CVD에 의한 알루미나 멤브레인의 표면개질에 관한 연구

The Study on Surface Modification of Alumina Membrane by CVD

  • 이동호 (연세대학교 세라믹공학과) ;
  • 최두진 (연세대학교 세라믹공학과) ;
  • 현상훈 (연세대학교 세라믹공학과) ;
  • 고광백 (연세대학교 도시공학과)
  • 발행 : 1995.12.01

초록

The change of permeation mechanism from Knudsen diffusion to micropore diffusion was observed after CVD modification of an alumina-sol coated alumina support which was prepared by slip coating process. Permselectivities of He/N2, H2/N2, and CO2/N2 were 5.67, 5.02, and 1.44, respectively. These values were higher than those under Knudsen diffusion controlled region.

키워드

참고문헌

  1. Membrane v.3 no.1 세라믹 멤브레인의 현황과 제법 S.H. Hyun
  2. Inorganic membranes Future prosects and applications for metal based membranes R. Govind;D. Atnoor;R. Zhao
  3. Cer. Bull. v.70 no.4 Ceramic membranes-growth prospects and opportunities K.K. Chan;A.M. Brownstein
  4. J. Mat. Sci. v.27 Synthesis of ceramic membranes:Part Ⅰ. Synthesis of non-supported and supported γ-alumina membranes without defect R.J.R. Uhlohorn;M.H.J. Huis;I.N. Tveld;K. Keizer;A.J. Buggraaf
  5. J. Korean Cer. Soc. v.29 no.11 기체 분리용 세라믹 복합분리막의 개발:Ⅲ 기체투과 모델에 의한 막의 특성 규명 현상훈;윤성필;강범석
  6. AIChE. J. v.38 no.3 CVD of solid oxides in porous substrates for ceramic membanes modification Y.S. Lin;A.J. Burggraaf
  7. AIChE. J. v.34 no.6 Improvement of surface transport property by surface modification T. Okubo;H. Inoue
  8. The materials science of thin films Milton Ohring
  9. Handbook of thin film technogy Maissel;Glang
  10. Inorganic membranes Gas separation perfornance of thin porous silica membrane prepared by sol-gel and CVD methods S. Kitao;M. Asaeda
  11. AIChE. J. v.38 no.6 A kinetic model of membrane formation by CVD of SiO₂and Al₂O₃ Michael Tsapatsis;George R. Galvalas
  12. Ind. Eng. Chem.Rev. v.30 Synthesis of hydrogen permselective SiO₂TiO₂Al₂O₃and B₂O₃membranes from the chloride precursors Michael Tsapatsis;Soojin Kim;Suk-Woo Nam;George R. Galvalas
  13. Che. Eng. Sci. v.46 no.12 Modeling and analysis of CVD processes in porous media for ceramic composite preparation Y.S. Lin;A.J. Burggraaf
  14. J. Appl. Phy. v.32 no.7 Helium diffusion through glass V.O. Altemose
  15. Che Eng. Sci. v.44 no.9 Deposition of H₂-permselective SiO₂films G.R. Galvalas;C.E. Megiris;S.W. Nam
  16. AIChE J. v.35 no.5 Single gas permeabilities through porous glass modified with tetra ethoxy silane T. Okubo;H. Inoue
  17. J. Mater. Sci. Lett. v.8 High permseletivities of microporous silica-modified γ-alumina membranes R.J.R. Uhlhorn;M.H.B.J. Huis;I.N. TVeld;K. Keizer;A.J. Burggraaf
  18. J. Chem. Soc. Faraday Trans. v.76 no.2 Study of molecular sieve carbons. Part Ⅰ:Pore structure, gradual pore opening and mechanisms of molecular sieving J.E. Koresh;A. Soffer
  19. Chem. Soc. Faraday Trans. v.76 no.2 Study of molecular sievc carbons. Part Ⅱ:Estimation of cross sectional diameters of non-spherical molecules J.E. Koresh;A. Soffer
  20. J. Mem. Sci. v.66 Gas transport and separation with ceramic membranes. Part Ⅱ.synthesis and separation properties of microporus membranes R.J.R. Uhlhron;K. Keizer;A.J. Burggraaf
  21. J. Electrochem. Soc. v.114 no.9 Deposition and properties of aluminum oxide obtained by pyrolytic decomposition of an aluminum alkoxide J.A. Aboaf
  22. Mat. Rev. Bull. v.23 Preparation and characterization of thin films of alumina by MOCVD J. Fourier;W. DeSisto;R. Brusasco;M. Sosnowski;R. Kershaw;J. Baglio;K. Dwight;A. Wold