Abstract
We have investigated the structure and the conductivity of the $Cd_{1-y}Zn_{y}$ Te films evaporated on the glass substrates (Corning 7059) by Electron Beam Evaporator (EBE) in pressure of approximately $1 {\times} 10^{-6}$ torr.The structure temperatures were held at both room temperature and $300^{\circ}C$, and the samples have annealed for an hour at $300^{\circ}C$ The survace com-position of the as-prepared films were slightly different from those of CdZn Te source material.Cd losses on the CdZnTe surface was measured about 4% of atomic ratio at room temperature substrate, whereas Zn atomic ratio was nearly constant, relatively. The strure is observed to be polycrystalline whose phase is mainly cubic phase. Thermal expansion coefficient was $6.30 {\times} 10^{-5}/^{\circ}C$ which was calculated from the variation of lattice parameter by X-ray powder pat-terns measured at $400^{\circ}C$.Diffraction peaks were slightly increased by annealing for an hour at $300^{\circ}C $, but they werey highly affected by substrate temperature during evaporation.
유리기판(Corning 7059) 위에 Electron Beam Evaporator(EBE)로 진공 중에서 증착된 $Cd_{1-y}Zn_{y}Te$(CZT) 박막의 표면 조성비와 결정구조를 조사하였다. 증착시 기판의 온도는 각각 실온과 $300^{\circ}C$였으며, 열처리는 압력 $1 {\times} 10^{-6}$ torr하에서 $300^{\circ}C$에서 1시간 동안 행하였다. 증착된 CZT 박막의 표면조성비는 Cd 원자가 상대적으로 약 4% 정도 부족하였고, Zn원자는 비교적 안정하였다. 박막의 구조는 거의 Cubic phase인 다결정(polycrystal)이었다. $400^{\circ}C$에서 측정된 X-선 분말 회절상으로부터 구한 격자상수 값으로부터 계산된 열팽창 계수는 $6.30 {\times} 10^{-6}/^{\circ}C$ 이었다. 박막은 열처리에 의하여 회절상의 peak가 증가하였으나 기판의 온도가 결정화에 더 큰 영향을 미치는 것으로 판단된다.
