센서학회지 (Journal of Sensor Science and Technology)
- 제4권2호
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- Pages.45-50
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- 1995
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
표면탄성파 필터를 위한 ZnO 박막의 특성
Characteristics of ZnO thin film for surface acoustic filters
- Kim, Young-Jin (Dept. of Electronics, Kyungpook Nat'l Univ.) ;
- Park, Wuk-Dong (Dept. of Electronics, Dongyang Univ.) ;
- Kim, Ki-Wan (Dept. of Electronics, Kyungpook Nat'l Univ.)
- 발행 : 1995.05.31
초록
The excellent c-axis oriented zinc oxide thin films were prepared by the RF magnetron sputtering method on glass substrates. Optimum fabrication conditions of the ZnO films were such that RF power, substrate temperature, and gas pressure of mixture Ar(50%):
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