Journal of Sensor Science and Technology (센서학회지)
- Volume 4 Issue 2
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- Pages.29-36
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- 1995
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Temperature Characteristics of Solid State Flow Velocity/Mass Sensor
반도체형 유속/유량센서의 온도특성
- Choi, Jai-Gun (Department of Electrical Engineering Kyungpook National University) ;
- Kim, Hyung-Pyo (Department of Electrical Engineering Kyungpook National University) ;
- Park, Se-Kwang (Department of Electrical Engineering Kyungpook National University)
- Published : 1995.05.31
Abstract
A constant solid state flow velocity/mass sensor has been fabricated and its characteristics were measured according to flow velocity and fluid temperature. Parameters of the sensor circuit were obtained by simulation using finite difference method. Sensitivity was 10mW/(cm/sec) in the range of flow velocity 0-45cm/sec and response time was within two seconds. For the experiment of fluid temperature variation, the sensor output was compensated at the rate of temperature variation
정온도형 반도체 유속/유량센서를 제작하여 유속변화와 온도변화에 대한 특성을 측정하였다. 회로의 파라메타는 유한차분법을 이용한 시뮬레이션으로 구하였다. 유속 실험에서 유속이 0-45cm/sec의 범위에서 감도는 10mW/(cm/sec)이고 응답시간은 2초 이내 였다. 유체온도 실험에서 온도 변화율이
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