Applied Microscopy
- 제24권4호
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- Pages.123-131
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- 1994
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- 2287-5123(pISSN)
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- 2287-4445(eISSN)
(001) Si에서 $NiSi_2$ 의 핵생성 초기 상태에 관한 투과전자현미경 연구
A Transmission Electron Microscopy Study of the Initial Stage of $NiSi_2$ Nucleation on the (001) Si
- Lee, Sang-Ho (Dept. of Electronic Materials Engineering, Korea Advanced Institute of Science and Technology) ;
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Lee, Jeong-Yong
(Dept. of Electronic Materials Engineering, Korea Advanced Institute of Science and Technology)
- 발행 : 1994.12.01
초록
In this study the initial stage nucleation and growth of Ni silicide on (001) Si by evaporation and furnace annealing have been investigated by transmission electron microscopy. The pressure was
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