Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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Sensitivity and Error Propagation Factors for Three-Parameter Ellipsometry

  • Published : 1994.11.20
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Abstract

The sensitivity factors and the error propagation factors are defined for the three-parameter ellipsometry (TPE). The sensitivity factor is useful for understanding the nature of the TPE measurements in connection with determination of the optical properties and the thickness of a film. On the other hand, the error propagation factors provide a quantitative tool for predicting the optimum condition for TPE experiments. Their usefulness is demonstrated for the passive film formed on nickel in aqueous solution.

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References

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