Bulletin of the Korean Chemical Society

  • 제15권11호
  • /
  • Pages.976-980
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  • 1994
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  • 0253-2964(pISSN)
  • /
  • 1229-5949(eISSN)
대한화학회 (Korean Chemical Society)
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Sensitivity and Error Propagation Factors for Three-Parameter Ellipsometry

  • 발행 : 1994.11.20
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초록

The sensitivity factors and the error propagation factors are defined for the three-parameter ellipsometry (TPE). The sensitivity factor is useful for understanding the nature of the TPE measurements in connection with determination of the optical properties and the thickness of a film. On the other hand, the error propagation factors provide a quantitative tool for predicting the optimum condition for TPE experiments. Their usefulness is demonstrated for the passive film formed on nickel in aqueous solution.

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참고문헌

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