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Determination of Trace Impurities in ULSI Grade Silane

  • Han, Ju-Tak (Daesung Cryogenic Research Instiute, Daesung Sanso Co., Ltd.) ;
  • Park, Byung-Eon (Daesung Cryogenic Research Instiute, Daesung Sanso Co., Ltd.) ;
  • Park, Doo-Seon (Daesung Cryogenic Research Instiute, Daesung Sanso Co., Ltd.) ;
  • Son, Moo-Ryong (Daesung Cryogenic Research Instiute, Daesung Sanso Co., Ltd.) ;
  • Manabe, Takeshi (Electronics Technology Center Electronic Division, TEISAN K. K.)
  • Published : 1994.11.20

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References

  1. Proceeding of 1986 SEMI Technology Symposium Ohmi, T.
  2. J. Crystal Growth v.68 Terao, H.;Sunakawa, H.
  3. J. Crystal Growth v.115 Matsumoto, K.;Uchida, K.
  4. ESG Analysis Tables Kimura, T.
  5. Silane Analysis by MS and GC/MS De Saint-Etienne, C.
  6. ALL Report Chlrosilanes and Disiloxane Anlysis in Silane by GC-TCD and GC-MS Kawabata, K.
  7. ALL Report Analysis of $H_2$O in $SiH_4$ by Panametrics Ogawara, Y.;Kawabata, K.
  8. L'Air Liquide Gas Encyclopedia L'Air
  9. Kirk-Othmer Encyclopedia of Chemical Technology
  10. TEISAN Mono Silane Technical Data No 1
  11. L'Air Liquide Utilization Guide for 'GASMIX' Program for Producing Gas Mixtures in ALPHAGAZ Plants
  12. Bulletin of The Korean Chemical Society v.15 no.10 Son, M. R.;Park, D. S.;Park, B. E.;Roh, B. L.
  13. Numerical Recipes Press, W. H.
  14. Comprehensive Analytical Chemistry Svehla, G.
  15. C-R4A Chromatopac Instruction Manual Shimadzu