Journal of the Korean Institute of Telematics and Electronics B (전자공학회논문지B)
- Volume 31B Issue 7
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- Pages.101-107
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- 1994
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- 1016-135X(pISSN)
Scanning Capacitance Microscope by Stage Driving
스테이지 구동방식 주사형정전용량 현미경
Abstract
In this work a scanning capacitance microscopy(SCaM) by stage driving is proposed and presented some of the experimental results.SCaM is a microscope which scans a surface of materials mechanically in two or two point five dimensions by a capacitance probe with a few tenth
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