전자공학회논문지A (Journal of the Korean Institute of Telematics and Electronics A)
- 제31A권5호
- /
- Pages.113-120
- /
- 1994
- /
- 1016-135X(pISSN)
유속 감지를 위한 실리콘 유량센서의 설계 및 제작
Design and Fabrication of Silicon Flow Sensor For Detecting Air Flow
초록
Silicon flow sensor that can detect the velocity and direction of air flow was designed and fabricated by integrated circuit process and bulk micromachining technique. The flow sensor consists of three-layered dielectric diaphragm, a heater at the center of the diaphragm, and four thermopiles surrounding the heater at each side of diaphragm as sensing elements. This diaphragm structure contributes to improve the sensitivity of the sensor due to excellent thermal isolation property of dielectric materials and their tiny thickness. The flow sensor has good axial symmetry to sense 2-D air flow with the optimized sensing position in the proposed structure. The sensor is fabricated using CMOS compatible process followed by the anisotropic etching of silicon in KOH and EDP solutions to form I
키워드