Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 7 Issue 5
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- Pages.369-375
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- 1994
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
Fabrication and characteristics of PZT ferroelectric thin films by Sol-Gel processing and rapid thermal annealing
Sol-gel법과 급속 열처리에 의한 PZT 강유전 박막의 제작과 그 특성
Abstract
In this study, ferroelectric thin films of PZT with different Zr/Ti ratio were prepared by sol-get processing and annealed by rapid thermal annealing at
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