E2M - 전기 전자와 첨단 소재 (Electrical & Electronic Materials)
- 제7권2호
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- Pages.152-156
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- 1994
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- 2982-6268(pISSN)
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- 2982-6306(eISSN)
졸-겔법으로 형성한 강유전체 PZT박막의 고온 단시간 열처리효과 및 전자 디바이스에의 응용
The rapid thermal annealing effects and its application to electron devices of Sol-Gel derived ferroelectric PZT thin films
초록
The rapid thermal annealing effects of Sol-Gel derived ferroelectric PZT thin films were investigated. It was found that rapid thermal annealing(RTA) of spin coated thin films on silicon typically
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