Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)
- Volume 7 Issue 2
- /
- Pages.123-129
- /
- 1994
- /
- 2982-6268(pISSN)
- /
- 2982-6306(eISSN)
A study on the SONOS EEPROM devices
SONOS EEPROM소자에 관한 연구
Abstract
SONOS EEPROM chips, containing several SONOSFET nonvolatile memories of various channel size, have been fabricated on the basis of the existing n-well CMOS processing technology for 1 Mbit DRAM (
Keywords