캐패시턴스형 센서를 사용한 자기베어링-축계의 진동특성 연구

A Vibration Characteristic Research of Rotor-Magnetic Bearing System Measured by Capacitance Type Sensors

The capacitive type transducers measure the displacement of rotating shaft using the voltage difference which is formed between the sensor plates and rotor so that the measured signal is not affected by the magnetic field generated by the magnetic bearing. In this paper, the capacitive transducers are embedded inside of the magnetic bearing. In order to verify the support characteristics of the capacitance sensor-magnetic bearing system, we experimented and analyzed the magnetic bearing-rotating shaft system up to 12,000 rpm. The magnetic bearing system proposed in this paper, successfully supports the rotating shaft and we can remain the maximum displacement below $5 \mu m$ at 12,000 rpm.