한국세라믹학회지 (Journal of the Korean Ceramic Society)

  • 제31권7호
  • /
  • Pages.715-722
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  • 1994
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  • 1229-7801(pISSN)
  • /
  • 2234-0491(eISSN)
한국세라믹학회 (The Korean Ceramic Society)
권호 표지

Off-axis Sputtering 방법으로 제조한 $Bi_2Sr_2Ca_2Cu_3O_x$ 박막의 초전도상 생성에 관한 연구

Study on the Formation of Superconducting Phases of $Bi_2Sr_2Ca_2Cu_3O_x$ Thin Films Prepared by Off-axis Sputtering

  • 심창훈 (포항공과대학교 재료금속공학과) ;
  • 양우석 (포항공과대학교 재료금속공학과) ;
  • 제정호 (포항공과대학교 재료금속공학과)
  • 발행 : 1994.07.01
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초록

Off-axis supttering using shielder was used to efficiently prevent negative oxygen ions from resputtering deposited films. In this method, the substrate was located vertically to the target and shielded by the semicircled steel plate. By using this method, the resputtering could be reduced, and 2223 high-Tc phase could be formed at the lower substrate temperature and in the broader temperature region. As increasing the substrate temperature, 2212, 2223, 2212 superconducting phases were formed by turns. 2223 phase was formed above 2$\times$10-2 torr, and 2212 phase was formed above 4$\times$10-2 torr.

키워드

참고문헌

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