References
- Silicon Carbide Theoretical and Practical Aspects of Silicon Carbide I.N. Frantsevich;I.N. Frantsevich(ed.)
- SiC Ceramics Silicon Carbide Prepared by Chemical Vapor Deposition T. Hirai;M. Sasaki
- Powder Metall.Int. continued in v.12 no.3;4 Review 13: Chemical Vapor Deposition of Silicon Carbide J. Schlichting
- Ceram.Bull. v.67 no.2 Advanced Ceramics by Chemical Vapor Deposition Techniques D.P.Stinton;T.M.Besmann;R.A.Lowden
- J. Am. Ceram. Soc. v.51 no.8 Deposition and Microstructure of Vapor-Deposited Silicon Carbide T.D. Gulden
- J. Cryst. Growth v.12 On the Formation of β-SiC from Pyrolysis of CH₃SiCl₃in Hydrogen A.W.C. Van Kemenade;C.F. Stemfoort
- Thin Solid Films v.40 The Structure of Chemical Vapor Deposited Silicon Carbide J. Chin;P.K. Gantzel;R.G. Hudson
- Thin Films by Chemical Vapor Deposition C.E. Morosanu
- J.Am.Ceram.Soc. v.66 no.8 Thermodynamic Calculations for the Chemical Vapor Deposition of Silicon Carbide A.I. Kingon;L.J. Lutz;P. Liaw;R.F. Davis
- J. Am. Ceram. Soc. v.68 no.4 Thermodynamic Analysis and Kinetic Implication of Chemical Vapor Deposition of Sic from Si-C-Cl-H Gas Systems G.S. Fischman;W.T. Petuskey
- JANAF Thermochemical Tables(2nd ed.). Natl.Stand.Ref.Data.Ser.(U.S.Natl Bur.Stand) no.37
- Inorg Chem. v.2 no.4 Alkoxychlorosilanes and Alkoxysilanes Containing Silane Hydrogen O.J. Keljnot
- J. Electrochem. Soc. v.134 no.12 Growth Characteristics of CVD Beta-Silicon Carbide D.J. Cheng;W.J. Shyy;D.H. Kuo;M.H. Hon
- J.Metal v.28 no.6 Chemical Vapor Deposition of Structural Ceramic Materials J.E. Doherty
- J. Electrochem. Soc. v.118 no.4 The Role of Homogeneous Reactions in Chemical Vapor Deposition K.J. Sladek
- Solid State Technol v.20 no.4 Low Pressure CVD Production Processes for Poly,Nitride,and Oxide Rosler
- J.Am.Ceram.Soc. v.75 no.9 Composition and Mechanical Properties of rf-Sputtered Amorphous Silicon Carbide Coating J.S. Huang;M. Ohland;W.S. Williams
- the Proc.of International Symposium on Ceramic Components for Engine, Japan Preparation and Mechanical Properties of CVD-SiC K. Niihara;A. Suda;T. Hirai
- J. Mater. Sci. Lett v.5 Chemical Vapour Deposition of SiC and Some of its Properties S. Motojima;H. Yagi;N. Iwamori
- Deposition Technologies for Films and Coatings R.F. Bunshah
- Thin Film Phenomena K.L. Chopra