The synthesis and formation mechanism of the fine $BaTiO_3$ powders by ultrasonic spray pyrolysis

초음파 분무 열분해법에 의한 $BaTiO_3$ 미분말의 합성 및 형성기구 규명

Fine $BaTiO_3$ powder was synthesized from the various starting solution with 0.05 M by ultrasonic spray pyrolysis method. The conditions of synthesis were fixed on flow rate was 0.5 cm/sec, low temperature furnace was $300^{\circ}C$, and high temperatures furnace was $700^{\circ}C$. The formation procedure was investigated directly by SEM with the collected particle from the each reaction step. Also, the trace of particle in reaction tube was researched theoretically. Fine $BaTiO_3$ was synthesized only in the case of nitrate aqueous solution. The synthesized $BaTiO_3$ powder was porous and spherical which was consist of primary particle at the size of 19.1 nm. The formation procedure was as follows : the particle size decreased in drying step and then increased in initial thermal decomposition step. Finally, particle size was decreased to $0.42 {mu}m$. The trace of particle in reaction tube was also theoretically simulated and discussed.

$BaTiO_3$ 미분말은 여러종류의 0.05 M 출발용액으로부터 초음파 분무 열분해법으로 합성하였다. 이때, 유속은 0.5 cm/sec, 저온로는 $300^{\circ}C$, 고온로는$700^{\circ}C$로 고정하였다. 입자의 형성과정은 반응 단계별로 포집된 분말을 SEM으로 직접 관찰하였고 또한, 반응기내에서의 입자의 거동을 이론적으올 고찰하고자 하였다. 순수한 $BaTiO_3$ 미분말은 출발용액이 nitrate aqueous solution인 경우에 합성이 가능하였다. 합성된 미분말은 19.1 nm의 일차입자들로 구성된 porous한 약 $0.42 {mu}m$크기의 구형의 이차임자였다. 형성과정은 건조단계에서 입자의 크기가 감소한 후 열분해 초기단계에서 증가하고 반응이 진행됨에 따라 점차 다시 감소하여 최종 $0.42 {mu}m$의 고화된 입자로 되었고 입도분포는 반응이 진행됨에 따라 점차 넓어졌다. 또한, 반응기내에서 입자들의 이론적 거동은 반응기 중심쪽으로 향하여 진행된다.