연구논문집

Korea Institute of Machinery & Materials (한국기계연구원)
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A Study on the Photoetching of AISI 304 Stainless Steel

304 스텐레스박판의 포토에칭기술 연구

  • 김만 (한국기계연구원 재료공정연구부 표면공학그룹) ;
  • 장도연 (한국기계연구원 재료공정연구부 표면공학그룹) ;
  • 이규환 (한국기계연구원 재료공정연구부 표면공학그룹) ;
  • 노병호 (한국기계연구원 재료공정연구부 표면공학그룹)
  • Published : 1993.12.31
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Abstract

Photoetching of AISI 304 stainless steel in ferric chloride solution has been studied. This paper investigated on the single side etching characteristics of 304 stainless steel, especially influence of etching temperature, spray pressure of ferric chloride etchant, and etching time with $50\mum$ and $75\mum$ line width photomask.

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