Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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Preparation of Aluminum Nitride Thin Films Using Single Precursor OMCVD

  • Park, Joon T. (Department of Chemistry, Korea Advanced Institute of Science and Technology) ;
  • Lee, June-Key (Department of Chemistry, Korea Advanced Institute of Science and Technology) ;
  • Kim, Se-Hun (Department of Chemistry, Korea Advanced Institute of Science and Technology) ;
  • Sung, Myung-Mo (Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
  • Kim, Yun-Soo (Advanced Materials Division, Korea Research Institute of Chemical Technology)
  • Published : 1993.04.20
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References

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