Journal of the Korean Institute of Telematics and Electronics A (전자공학회논문지A)
- Volume 30A Issue 6
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- Pages.22-30
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- 1993
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- 1016-135X(pISSN)
Fabrication of Integrated Silicon Pressure Sensor
집적화된 실리콘 압력센서의 제작
Abstract
An integrated silicon pressure sensor with frequency output has been fabricated, measured, and tested. The standard bipolar process is applied and thin diaphragm was formed using EDP anisotropic etchant. Output frequency was 769 Hz-3.1 kHz at the pressure range of 0-10 psi. It operates at the temperature range of 0-50
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