Journal of the Korean Vacuum Society (한국진공학회지)

The Korean Vacuum Society (한국진공학회)
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Disign of $Hg_{1-x}Cd_xTe$ OMVPE System and ARIIV Reactor Chamber

$Hg_{1-x}Cd_xTe$ OMVPE System 과 ARIIV Reactor Chamber의 설계 및 제작

  • ;
  • J.D. Parsons (Department of Electrical Engineering and Applied Physics Oregonh Graduate Institute of Science and Technology)
  • Published : 1993.12.01
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Abstract

The direct growth OMVPE system, designed specificallyfor direct growth of Hg1-xCdxTe using annular rectant inlet inverted verticla (ARIIV) reactor, was constructed. This paper presents the detailed technical approach on a newly designed ARIIV reactor that increases Hg incorporation, imposes uniformity, and avoids the needs for temperature processing to create alloys by inter diffusion approach.

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