Journal of the Korean Vacuum Society (한국진공학회지)
- Volume 2 Issue 1
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- Pages.113-120
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- 1993
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- 1225-8822(pISSN)
Progress of the Turbo Molecular Pump
- Ota, Masato (Seiko Seiki co. Ltd.) ;
- Urano, Chiaki (Seiko Seiki co. Ltd.)
- Published : 1993.03.01
Abstract
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