광자기 디스크의 기록 및 자기적 특성에 산소가 미치는 영향

Effect of Oxygen on the Magnetic and Recording Characteristics of Magneto-Optical Disk

광자기 디스크의 제조시 기록막내부의 산소함량에 따른 기록 및 자기적 특성의 변화를 연구하였다. 기록막내의 산소함량 변화는 반응성 스퍼터링에 의해 조절하였으며 스퍼터링 전과정 동안 산소의 거동을 in-situ 잔류가스분석기로 조사하였다. 산소함량의 증가에 따라 보자력은 감 소하였으나 수직이방성 및 수직 각형비등은 변화하지 않았다. 대부분의 첨가된 산소는 스퍼터링 과정중 소모되어 Tb원자와 안정한 산화물을 형성하여 자기적 조성의 변화를 초래하였지만 임계기 록크기와 임계외부자계크기에만 약간의 변화를 가져왔을 뿐 디스크의 기록신호잡음비에는 별로 영향을 미치지 않았다. 또한 디스크의 신뢰도면에서도 크게 감소하지 않았다.

The effects of differential partial pressures of oxygen during sputtering on the magnetic and recording characteristics of magneto-optical disks were investigated. Different flows of oxygen were deliberately introduced into the sputtering chamber to have a variety of partial pressures of oxygen during sputtering. A residual gas analyzer was employed to monitor the oxygen peak before, during, and after sputtering and to estimate the reacted oxygen amount. Most of the oxygen introduced into the chamaber was reacted during sputtering. As the partial pressure of oxygen increased, the oxygen content of the TbFeCoCr film increased also. The oxygen appeared to be bound as Tb-O, effectively decreasing the magnetically active Tb content of the film The coercivity decreased but the squareness of the Kerr hysteresis loops was still excellent. The perpendicular anisotropy was not significantly affected by oxygen amount. The carrier-to-noise ratio, includi!1g the write power sensitivity and bias field sensitivity did not change too much with oxygen content in the film The disks sputtered with oxygen showed better bias field sensitivity with lower write power threshold than the disk sputtered without oxygen, due to high demagnetization during domain formation. No significant degradation of coercivity for the disk sputtered oxygen was observed during an accelerated aging test.