대한기계학회논문집 (Transactions of the Korean Society of Mechanical Engineers)
- 제17권9호
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- Pages.2315-2328
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- 1993
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- 1225-5963(pISSN)
DOI QR Code
웨이퍼 표면상의 입자침착에 관한 수치 시뮬레이션
Numerical Simulation of Particle Deposition on a Wafer Surface
초록
The turbulence effect of particle deposition on a horizontal free-standing wafer in a vertical flow has been studied numerically by using the low-Reynolds-number k-.epsilon. turbulence model. For both the upper and lower surfaces of the wafer, predictions are made of the averaged particle deposition velocity and its radial distribution. Thus, it is now possible to obtain local information about the particle deposition on a free-standing wafer. The present result indicates that the particle deposition velocity on the lower surface of wafer is comparable to that on the upper one in the diffusion controlled deposition region in which the particle sizes are smaller than
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