Korean Journal of Materials Research (한국재료학회지)

Materials Research Society of Korea (한국재료학회)
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Spetroscopic Diagnostics of Reactive Plasma in a Facing Target Sputtering Unit

대향타겟트 스파터기에서 반응성 플라즈마의 스펙트로스코프 검진

  • Na, Jong-Gab (Korea Institute of Science and Technology) ;
  • Lee, Taek-Dong (Korea Institute of Science and Technology) ;
  • Park, Soon-Ja (Dept. of Inorganic Materials Engineering, Seoul National University)
  • 나종갑 (한국과학기술연구원) ;
  • 이택동 (한국과학기술연구원) ;
  • 박순자 (서울대학교 무기재료공학과)
  • Published : 1992.10.01
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Abstract

Spectroscopic diagnostics on reactive plasmas was carried out in a facing target sputtering unit with BaO +12Fe composite targets and 50% $O_2+$ Ar sputter gas. Spectra of rective plasmas were composed of peaks which were assigned to be Ba, B$a^+$, Fe, FeO, F$e^+$, Ar, $Ar^+$, O, $O^+$. As detecting positions in plasmas were far away from targets, the relative peak intensities of the ions and neutral species were decreased, but the relative intensities of the former decreased faster than those of the latter.

대향타겟트형 스파터기에서 BaO-l2Fe 복합타겟트를 사용하고 50% $O_2$+Ar 스파터가스를 사용한 반응성 프라즈마를 스펙트로스포프법으로 검진하였다. 프라즈마의 스펙트럼은 Ba, B$a^+$, Fe, FeO, F$e^+$, Ar, $Ar^+$, O, $O^+$의 피크로 이루어져 있었으며 타겟트로 부터 멀어짐에 따라 이온의 상대강도는 중성원소의 그것에 비하여 더 감소하였다.

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