한국표면공학회지 (Journal of the Korean institute of surface engineering)
- 제25권2호
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- Pages.90-96
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- 1992
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- 1225-8024(pISSN)
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- 2288-8403(eISSN)
폴리이미드 위에 스퍼터 증착된 구리 박막의 미세구조
Microsturctures of copper thin films sputtered onto polyimide
- Chung, Tae-Gyeong (Dept. of electronic materials science and engineering, KAIST) ;
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Kim, Young-Ho
(Dept. of materials engineering, Hanyang university) ;
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Yu, Jin
(Dept. of electronic materials science and engineering, KAIST)
- 발행 : 1992.04.01
초록
Thed effects of sputter gas pressure and substrate surface micro-roughness on the microstructure and surface topography have been investigated in the Cu thin films sputter deposited onto polyimide substrates. The surface roughness of polyimide was controlled by oxygen rf plasma treatment. In the Cu film deposited at the pressure of 5 mtorr, the surface is smooth and the columnar structure is not visible regardless of polyimide surface more open boundaries. The polyimide surface roughness enhances these effects, These phenomena can be explained in therm of atomic shadowing effect.
키워드