Abstract
The prediction of vibration response of floor is necessary in order to check whether the floor vibration level will satisfy the allowable vibration standard of precise machinery such as electronic microscopes in semiconductor manufacturing plant before the installation of various neighboring equipment facility. In conventional vibration isolation, we were mainly interested in minimization of vibration transmissibility and stabilization of vibration isolation system. But in order to predict vibration response of floor, it is necessary to know exciting force of equipment installed on the floor and the mobility of the floor. We measured the exciting force of the dropped mass assumed as equipment and the mobility of some practical building floor using large impact hammer. And from this we predicted the vibration response of floor on which the mass dropped. This predicted vibration response of floor is compared with measured vibration response. Through upper procedure, we examined the possibility of predicting vibration response of floor from the information of exciting force of equipment and the mobility of floor.