References
- Ceramics Int v.13 Ceramics in Microelectronics R.R.Tummala
- J. Mater. Res. v.5 Electrical Performance and Reaction kinetics of Silicone Gels C.P. Wong
- Better Ceramics Through Chemistry III Investigation of Processing Parameters on Stability of (SOG) Films on Patterned Si Wafers S.G. Shyu;J.J. Smith;S. Baskaran;R.C. Buchanan;C.J. Brinker(ed);D.E. Clark(ed);D.R. Ulrich(ed)
- Am. Ceram. Soc. Bull v.64 Sol-Gel Synthesis of Glasses: Present and Future S. Sakka
- J. Non-Cryst. Sol. v.70 Sol→Gel→Glass.I. Gelation and Gel Structure C.J. Brinker
- J. Non-Cryst. Sol. v.82 Hydrolysis and Polycondensation of Dimethyldiethoxysilane and Methyltriethoxysilane as Materials for the Sol-Gel Process S. Sakka;Y. Tanaka;T. Kokubo
- Acta. Chem. Scand v.25 Infrared and Raman Spectra of Cyclic Dimethylsiloxane Oligomers T. Alvik;J. Dale
- J. Am. Ceram. Soc. v.74 Sol-gel Kinetics Followed by Cylindrical Attenuated Total Reflectance Infrared Spectroscopy A.a. Kline;M.e. Mullins
- J. Appl. Phys. v.36 General Relationship for the Thermal Oxidation of Silicon B.E. Deal;A.s. Grove
- Science of Ceramic Chemical Processing Dielectric Properties of Silicon Dioxide and Silicon-oxynitride Sol-Gel Thin Films L.A. Carman;C.g. Pantano;L.L. Hench(ed);D.R. Ulrich(ed)
- Microelectrinic Materials and Processes Silicon Dioxide Properties G.J. Declerck;R.A. Levy(ed)