한국광학회지 (Korean Journal of Optics and Photonics)
- 제3권2호
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- Pages.133-136
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- 1992
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- 1225-6285(pISSN)
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- 2287-321X(eISSN)
효율적 균일 방전을 위한 레이저 전극 형상 비교
Comparison of laser electrodes for efficient uniform disharge
- Kim, Dong-Hwan (Applied Physics Lab. Korea Institute of Science and Technology) ;
- Chu, Hong (Applied Physics Lab. Korea Institute of Science and Technology) ;
- Choi, Sang-Sam (Applied Physics Lab. Korea Institute of Science and Technology)
- 발행 : 1992.06.01
초록
엑시머 레이저나 TEA
Calculation and comparison of the design parameter between Chang and Ernst profile that can be used for the uniform discharge in excimer or TEA
키워드