Korean Journal of Optics and Photonics (한국광학회지)
- Volume 3 Issue 2
- /
- Pages.133-136
- /
- 1992
- /
- 1225-6285(pISSN)
- /
- 2287-321X(eISSN)
Comparison of laser electrodes for efficient uniform disharge
효율적 균일 방전을 위한 레이저 전극 형상 비교
- Kim, Dong-Hwan (Applied Physics Lab. Korea Institute of Science and Technology) ;
- Chu, Hong (Applied Physics Lab. Korea Institute of Science and Technology) ;
- Choi, Sang-Sam (Applied Physics Lab. Korea Institute of Science and Technology)
- Published : 1992.06.01
Abstract
Calculation and comparison of the design parameter between Chang and Ernst profile that can be used for the uniform discharge in excimer or TEA
엑시머 레이저나 TEA
Keywords