Abstract
The structural variation process and relation of water of amorphous Ta-IPA bulk and thin film upon heat-treatment conditions of $25^{\circ}C$ and $340^{\circ}C$ have been studied by using the radial distribution functions$ (RDF_{obs})$ estimated from the X-ray diffraction intensities, TG-DTA and Infrared spectrophotometer. The expected Ta-IPA structure was determined by comparing the $ RDF_{obs}$ with that for $RDF_{calc}$. The structure of specimens prepared by sol-gel method is basically based on the L-$Ta_2O_5$ crystal. Thin film of samples are mainly composed of octahedral Ta$O_6$and have smaller cluster than bulk samples.
Sol-gel법을 통하여 만들어진 비정질 Ta-IPA 괴상과 박막을 $25^{\circ}C$와 $340^{\circ}C$로 열처리한 구조의 차이점과 구조수와의 관계를 TG-DTA, IR과 X-선회절 강도측정으로부터 구한 동경분포곡선 등을 이용하여 알아보았다. 각 시편들을 L-$Ta_2O_5$ 결정의 물성 및 동경분포곡선(calc-RDF)과 비교하였다. 박막은 8면체-$TaO_6$로 괴상보다 작은 cluster로 구성되어 있었다.