전해질 용액의 농도가 단결정 Si의 마찰거동에 미치는 영향

Effect of Electrolytic Concentration on Frictional Behavior of Single Crystal Silicon

The Frictional behavior in single crystal (111) p-type silicon as influenced by electolytic solutions have been studied. Linear scratching by diamond indentor was carried out to show the variation of friction between silicon and diamond indentor immersed in electrolytic solutions. The results indicate that concentration of the solutions influence the fricational coefficient. In addition there is a correlation between measured zeta-potential and frictional coefficients. The zeta-potential in various concentrations was measured to estimate the variation of the Peierls energy. The proposed model predicts a minimum frictional coefficient near a concentration of $10^{-3}$ M/l NaOH in deionized water and explains the chemomechanical effect observed in this study.