Characterization of Microscale Objects based on the Diffraction Pattern Analysis

회절무늬를 이용한 미세물체의 특성 측정

This paper describes the theoretical analysis of a diffraction pattern analyzer for the characterization of microscale object fields and a method for obtaining size and size distribution from the measured diffraction pattern of the object fields. For the experimental verification, a typical optical Fourier transform system was set up and calibrated with 2 5$\mu \textrm m$ and 50$\mu \textrm m$ pinholes. The system responses to distilled water droplets, alcohol, glycerin and silicon oil were imaged with vidicon, and the image was processed to determine the size distribution of each liquid particle field. The energy distribution function which is defined as the total intensity of a circular ring in the diffraction pattern was used to determine the dominant particle size of each liquid particle field.

회절현상을 이용하여 복수 미세 입자의 특성 측정을 위한 격자형의 검지기를 사용한 데이터 처리방식을 제안하고 이에 따른 광학 및 신호처리 시스템을 구성하였다. 에너지 분포함수의 최대치와 최소치를 이용하여 같은 분무기로 분무된 증류수, 알코올, 실리콘 오일, 글리세린 등의 분포를 측정했는데 최대치와 최소치에 의해 구한 입자의 크기가 서로 잘 일치하였다.