고주파플라즈마 CVD법에 의한 다이아몬드상 탄소박막의 합성

Synthesis of Diamond-Like Carbon Films by R.F.Plasma CVD

  • 박상현 (경남대 공대 전기공학과) ;
  • 이덕출 (인하대 공대 전기공학과)
  • 발행 : 1990.10.01

초록

Diamond thin films were synthesized from the mixed gases of methane and hydrogen on silicon substrates by RF plasma chemical vapor deposition and deposited films were investigated by SEM, X-ray diffractometry and Raman spectroscopy. It is found that high quality diamond-like carbon films were successfully synthesized by PECVD under the deposition condition of 1-10 vol% of methane concentration, 0.15-0.4torr of reactor pressure, 500W of RF power, and 5-20hr of reaction time. Especially, cubo-octahedral diamond-like carbon particles were synthesized by employing 1.0 vol % of methane concentration and 0.4torr of the reactor pressure.

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