The Transactions of the Korean Institute of Electrical Engineers (대한전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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Numerical Analysis of Electron Energy Variation in Weakly Ionized Plasma Under Low Alternating Electric Fields

교류 저전계 인가시 약이온화된 프라즈마 전자에너지 변화의 수치해석

  • 지철근 (서울대 공대 전기공학과) ;
  • 장우진 (서울사업대 전기공학과) ;
  • 박왕렬 (서울대 대학원 전기공학과) ;
  • 이진우 (서울대 공대 전기공학과)
  • Published : 1990.05.01
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Abstract

We have derived the equation which involves the variation of electron energy with time in a lowly ionized plasma when a low alternating electric field is applied. We consider only elastic collisions between electrons and neutral atoms. This equation is solved using the 4th-order Runge-Kutta method, and applied to argon gas discharge which is driven by source frequency of 100, 1K, 10K, 100K, and 1M (Hz). The results show that the variation of electron energy becomes flat with higher frequencies.

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