Journal of the Korean Institute of Telematics and Electronics (대한전자공학회논문지)
- Volume 26 Issue 6
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- Pages.48-56
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- 1989
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- 1016-135X(pISSN)
Fabrication and Characteristics of Photoconductive Amorphous Silicon Film for Facsimile
팩시밀리용 비정질 실리콘 광도전막의 제작 및 특성
- Kim, Jeong-Seob (Dept. of Elec. Eng., Kyungpook Nat'l Univ.) ;
- Oh, Sang-Kwang (Dept. of Elec. Eng., Kyungpook Nat'l Univ.) ;
- Kim, Ki-Wan (Dept. of Elec. Eng., Kyungpook Nat'l Univ.) ;
- Lee, Wu-Il (Dept. of Elec. Eng., Kyungpook Nat'l Univ.)
- Published : 1989.06.01
Abstract
Contact-type linear image sensors for facsimile have been fabricated by means of rf glow discharge decomposition method of silane. The dependence of their electrical and optical properties on rf power,
밀착형 1차원 영상감지소자로서 팩시밀리에 사용될 광도전막을 사일랜듸 글로방전 분해법으로 제작하였다. 우선 rf전력, 사일랜유량, 분위기 가스압,
Keywords