한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)
- 제5권3호
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- Pages.43-47
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- 1988
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
레이저 간섭장치를 이용한 높이마이크로미터 교정장치의 개발
Development of height micrometer calibration system by using laser interferometer
초록
Height micrometer is a kind of end standards. It consists of a stack of gage blocks which is capable of moving up and down by a micrometer head. Height micrometer requires calibration with very high accuracy because its resolution is generally 1 .mu. m and its accuracy is higher than few micro- meters. Conventionally, comparison with gage blocks is used to calibrate height micrometer, but it is less accurate and time consuming method. A height micrometer calibration system using a laser interferometer instead of gage blocks has been developed. The measuring range of the system is 300mm, and the accuracy is better than
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