Development of height micrometer calibration system by using laser interferometer

레이저 간섭장치를 이용한 높이마이크로미터 교정장치의 개발

Height micrometer is a kind of end standards. It consists of a stack of gage blocks which is capable of moving up and down by a micrometer head. Height micrometer requires calibration with very high accuracy because its resolution is generally 1 .mu. m and its accuracy is higher than few micro- meters. Conventionally, comparison with gage blocks is used to calibrate height micrometer, but it is less accurate and time consuming method. A height micrometer calibration system using a laser interferometer instead of gage blocks has been developed. The measuring range of the system is 300mm, and the accuracy is better than ${\pm}0.5{\mu}m$ A new method of maintaining the laser-beam alignment is described as well.