Journal of the Korean Ceramic Society (한국세라믹학회지)

The Korean Ceramic Society (한국세라믹학회)
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Electrical Conductivity of Vacuum Evaporated Al Films on Glass

유리표면에 진공증착된 Al박막의 전기전도성

  • 김동호 (오리온 전기 개발부) ;
  • 박현수 (전남대학교 공과대학 무기재료공학과) ;
  • 정창주 (전남대학교 공과대학 무기재료공학과) ;
  • 최석진 (전남대학교 공과대학 무기재료공학과)
  • Published : 1987.02.01
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Abstract

The relative electrical conductivity of vacuum deposited Al films on a soda-lime(2947) and an alumino boro silicate(7809) glass was investigated with the variation of the relative humidity,temperature and film thickness. The structure and microstructure of Al films before and after exposure to the humidity wereexamined by the X-ray Diffractormenter(XRD) and Scanning Electron Microscope(SEM). As the relative humidity increased, the electrical conductivity of Al films on both glasses was decreased. However, the Al films on 7809 glass showed higher conductivity than that of 2947 glass under the same testing conditions. The decreasing of electrical conductivity was caused by the formation of Aluminum hydroxide which was made by the reaction between the aluminum films and water vapor.

Keywords

References

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