Preparation of Iron Oxide Thin Films by Vacuum Evaporation Method and Its Electrical Properties

진공증착법에 의한 산화철박막의 제조 및 전기적특성

  • 조경형 (인하대학교 공과대학 무기재료공학과) ;
  • 오재희 (인하대학교 공과대학 무기재료공학과)
  • Published : 1985.06.01

Abstract

The hematite the magetite and the maghemite thin film were prepared by oxidation and reductino of the vaccum-evaporated iron thin film. Interre;atoms between film preparation process and the electrical properties were investigated. At room temperature the electrical conductivity of the iron the hematite the magnetite and the maghemite thin film were $1{\times}10^4\Omega^{-1}cm^{-1}$, 2{\times}10^{-5}\Omega^{-1}cm^{-1}$, $3{\times}10^{-5}\Omega^{-1}cm^{-1}$, and $4{\times}10^{-5}\Omega^{-1}cm^{-1}$, resp-ectively. The surface of each thin film was dense and homogeneous. At the temperature that the iron thin film was converted into the hematite thin film the electrical conductivity decreased rapidly and the electrical con-ductivity of the hematite thin film increased as temperature increased. The hematite thin film was reduced to the magnetite thin film in H2 atmosphere. The electrical conductivity decreased rapidly at the temperature that the maghemite thin film is formed by oxidation of the magnetite thin film and the electrical conductivity of the maghemite thin film increased as temperature increased.

Keywords

References

  1. IEEE. Trans. Magn. v.Mag-15 no.6 Magnetic Recording Characteristics of Sputtered γ-Fe₂O₃Thin Film Disks S. Hattori;Y. Ishii
  2. IEEE. Trans. Magn. v.Mag-16 no.5 New Preparation Process for Sputtered γ-Fe₂O₃Thin film Y. Ishii;A. Terada;O. Ishii;S. Ohta;S. Mattri;K. Makino
  3. J. Appl. Phys. v.53 no.3 High Density Recording Characteristics of Sputtered γ-Fe₂O₃Thin Film Disks S. Yoshi;O. Ishii
  4. IEEE Trans. Magn. v.Mag-17 no.6 A New Preparation Method for γ-Fe₂O₃Thin Film Recording Media K. Tagami;K. Nishinoto;M. Aoyoma
  5. IEEE Trans. Magn. v.Mag-9 Magnetite Thin Films J. Y. Feng;C. H. Bajorek;M. A. Nicolet
  6. IEEE Trans. Magn. v.Mag-11 no.5 Ferrite Thin Films for High Recording Density N. Inagaki;S. Hattori;Y. Ishii;Katsuraki
  7. IEEE Trans. Magn. v.Mag-13 no.5 Formation of Ferrite Thin Films by Vacuum Evaporation with Annealing Process N. Satou;T. Namikawa;Y. Yamazaki
  8. Magnetic Oxides Electrical Transport Properties R. Parker;D.J. Craik(ed)
  9. Phys. Rev. v.93 no.6 Electrical Properties of α-Fe₂O₃ F.J. Morin
  10. 電氣化學會誌 v.34 no.515-518 α-Fe₂O₃の半導休的特性 今岡保良
  11. Japanese J. Appl. Phys. v.22 no.2 Some Electrical Properties of γ-Fe₂O₃Ceramics Y. Nakatani;M. Matsuoka