Surface Error Generation of Freeform Mirror Based on Zernike Polynomial for Optical Performance Prediction

Not only the magnitude of the mirror surface error, the pattern matters as it produces certain aberrations. In particular, the surface error of the freeform mirrors, which are optimized to eliminate specific aberrations, might show much higher sensitivity in optical performance. Therefore, we analyze the mirror surface error with Zernike polynomials with the goal of generating a realistic error surface. We investigate the surface error of the freeform mirror fabricated by diamond turning machine to analyze the realistic tendency of the error. The surface error with 0.22 ㎛ root-mean-square value is fitted to the Zernike terms using the incremental fitting method, which increases the number of the fitting coefficients through steps. Furthermore, optical performance via surface error pattern based on Zernike terms is studied to see the influences of each term. With this study, realistic error surface generation may allow higher accuracy not only for the feasibility test but also for all tests and predictions using optical simulations.