Proceedings of the Korean Institute of Surface Engineering Conference (한국표면공학회:학술대회논문집)
- 2018.06a
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- Pages.100-100
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- 2018
Preventing Overburden on Cu Redistribution Layers with Self-Assembled Monolayers
자기조립단분자막을 이용한 구리 재배선 상의 Overburden 방지
- Published : 2018.06.13
Abstract
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