해양환경안전학회:학술대회논문집 (Proceedings of KOSOMES biannual meeting)

해양환경안전학회 (The Korean Society of Marine Environment and safety)
권호 표지

초기 플라즈마 방전에 미치는 RF 방전전압 변조의 영향

Effect of Amplitude Modulation on Initial RF Plasma Discharge

  • Kim, Yeonwon (Division of Marine Mechatronics, Mokpo National Maritime University) ;
  • Lee, Jae-ung (Division of Marine Mechatronics, Mokpo National Maritime University)
  • 발행 : 2017.04.27
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초록

We have investigated effects of AM on initial phase of rf discharge plasmas. Amplitude modulation significantly affects on initial rf discharge plasmas.

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