Proceedings of KOSOMES biannual meeting (해양환경안전학회:학술대회논문집)

The Korean Society of Marine Environment and safety (해양환경안전학회)
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Effect of Amplitude Modulation on Initial RF Plasma Discharge

초기 플라즈마 방전에 미치는 RF 방전전압 변조의 영향

  • Kim, Yeonwon (Division of Marine Mechatronics, Mokpo National Maritime University) ;
  • Lee, Jae-ung (Division of Marine Mechatronics, Mokpo National Maritime University)
  • Published : 2017.04.27
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Abstract

We have investigated effects of AM on initial phase of rf discharge plasmas. Amplitude modulation significantly affects on initial rf discharge plasmas.

Keywords