한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
- /
- Pages.372.2-372.2
- /
- 2016
Fabrication of Wafer-Scale Anodized Aluminum oxide(AAO)-Based capacitive biosensor
- Kim, Bongjun (Department of Physics, Yonsei Universiy) ;
- Oh, Jeseung (Proteometech Inc.) ;
- Yoo, Kyunghwa
- 발행 : 2016.02.17
초록
Various nanobiosensors have been developed and extensively investigated. For their practical applications, however, the reproducibility and uniformity should be good enough and the mass-production should be possible. To fabricate anodized aluminium oxide (AAO)-based nanobiosesnor on wafer scale, we have designed and constructed a wafer-scale anodizing system.