Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2016.02a
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- Pages.371.2-371.2
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- 2016
Fabrication of One-Dimensional Graphene Metal Edge Contact without Graphene Exfoliation
- Choe, Jeongun (School of Integrated Technology, Yonsei University) ;
- Han, Jaehyun (School of Integrated Technology, Yonsei University) ;
- Yeo, Jong-Souk (School of Integrated Technology, Yonsei University)
- Published : 2016.02.17
Abstract
Graphene electronics is one of the promising technologies for the next generation electronic devices due to the outstanding properties such as conductivity, high carrier mobility, mechanical, and optical properties along with extended applications using 2 dimensional heterostructures. However, large contact resistance between metal and graphene is one of the major obstacles for commercial application of graphene electronics. In order to achieve low contact resistance, numerous researches have been conducted such as gentle plasma treatment, ultraviolet ozone (UVO) treatment, annealing treatment, and one-dimensional graphene edge contact. In this report, we suggest a fabrication method of one-dimensional graphene metal edge contact without using graphene exfoliation. Graphene is grown on Cu foil by low pressure chemical vapor deposition. Then, the graphene is transferred on