한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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- Pages.185.1-185.1
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- 2016
A Novel Transmission line model of Cutoff Probe for precise measurement of high density plasma
- 김시준 (충남대학교) ;
- 이장재 (충남대학교) ;
- 김광기 (충남대학교) ;
- 이바다 (충남대학교) ;
- 염희중 (충남대학교) ;
- 이영석 (충남대학교) ;
- 김대웅 (한국 과학기술원) ;
- 김정형 (한국표준과학연구원) ;
- 유신재 (충남대학교)
- Kim, Si-Jun ;
- Lee, Jang-Jae ;
- Kim, Gwang-Gi ;
- Lee, Ba-Da ;
- Yeom, Hui-Jung ;
- Lee, Yeong-Seok ;
- Kim, Dae-Ung ;
- Kim, Jeong-Hyeong ;
- 발행 : 2016.02.17
초록
Cutoff probe, diagnostics instrument for plasma density, have been received an extensive attention due to simple, robust and lowest assumption. Although the cutoff probe has a long history, physical model is limited in low density plasma. For that reason, we propose a novel transmission line model of cutoff probe for precise measurement of high density plasma. In addition simplified circuit model can be obtained from transmission line model. It can explain simply physics of cutoff probe in high density plasma.