한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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- Pages.169-169
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- 2016
Effect of Pressure and Temperature on Al-doped Zinc Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering
- Kang, Junyoung (School of Electronic Electrical Engineering, College of Information and Communication Engineering, Sungkyunkwan University) ;
- Park, Hyeongsik (School of Electronic Electrical Engineering, College of Information and Communication Engineering, Sungkyunkwan University) ;
- Yi, Junsin (School of Electronic Electrical Engineering, College of Information and Communication Engineering, Sungkyunkwan University)
- 발행 : 2016.02.17
초록
In this paper, we report electrical, optical and structural properties of Al-doped zinc oxide (AZO) thin films deposited at different substrate temperatures and pressures. The films were prepared by radio frequency (RF) magnetron sputtering on glass substrates in argon (Ar) ambient. The X-ray diffraction analysis showed that the AZO films deposited at room temperature (RT) and 20 Pa were mostly oriented along a-axis with preferred orientation along (100) direction. There was an improvement in resistivity (